JPS6231186Y2 - - Google Patents
Info
- Publication number
- JPS6231186Y2 JPS6231186Y2 JP5580684U JP5580684U JPS6231186Y2 JP S6231186 Y2 JPS6231186 Y2 JP S6231186Y2 JP 5580684 U JP5580684 U JP 5580684U JP 5580684 U JP5580684 U JP 5580684U JP S6231186 Y2 JPS6231186 Y2 JP S6231186Y2
- Authority
- JP
- Japan
- Prior art keywords
- section
- processing liquid
- silicon oxide
- treatment
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 86
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 50
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 47
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 41
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 238000007654 immersion Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 239000007864 aqueous solution Substances 0.000 claims description 15
- 238000001914 filtration Methods 0.000 claims description 13
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 12
- 239000004327 boric acid Substances 0.000 claims description 12
- 239000002253 acid Substances 0.000 claims description 7
- 229920006395 saturated elastomer Polymers 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 15
- 239000000243 solution Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000010808 liquid waste Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5580684U JPS60168574U (ja) | 1984-04-16 | 1984-04-16 | 酸化珪素被膜の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5580684U JPS60168574U (ja) | 1984-04-16 | 1984-04-16 | 酸化珪素被膜の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60168574U JPS60168574U (ja) | 1985-11-08 |
| JPS6231186Y2 true JPS6231186Y2 (en]) | 1987-08-10 |
Family
ID=30578826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5580684U Granted JPS60168574U (ja) | 1984-04-16 | 1984-04-16 | 酸化珪素被膜の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60168574U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4972392B2 (ja) * | 2006-12-20 | 2012-07-11 | アマテイ株式会社 | 釘の着色塗装装置 |
-
1984
- 1984-04-16 JP JP5580684U patent/JPS60168574U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60168574U (ja) | 1985-11-08 |
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